High density fast phosphor for electron microscopy
AssigneeGatan, Inc.
InventorsEdward Michael James, Colin Geoffrey Trevor, Joseph Webster, David Joyce, Nerine Cherepy, Steven A. Payne, Zachary M. Seeley
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Abstract
A fast-decaying, dense phosphor having relatively high light emission is described. Through a combination of material selection, growth and deposition technique, phosphor thin films are made that preserve the necessary light output when used in thin-films, unlike common fast phosphors, such as P-46, P-47, and also have an afterglow that decays much faster than common bright phosphors, such as P-43. Use of the phosphor is described in applications where acquiring many frames/images very quickly is required.
Claims25
A thin film sensor for emitting light when excited by an electron beam, comprising:
- a cerium-doped or praseodymium-doped, non-transparent, garnet crystalline phosphor powder comprised of particles having a grain size substantially between 1 and 5 microns,
- wherein the thin film sensor has a thickness of 100 μm or less,
- said phosphor having a light output primary decay time to less than a factor of 1/e (˜0.37) of peak light emission at 1 microsecond or less after excitation by the electron beam has ceased, and
- said phosphor having an emission efficiency equal to or greater than 25% of phosphor P-43.
A thin film sensor for emitting light when excited by an electron beam, comprising:
- a cerium-doped or praseodymium-doped, non-transparent, garnet crystalline energy conversion phosphor powder, comprised of particles having a grain size substantially between 1 and 5 microns,
- said phosphor having a light output primary decay time to less than a factor 1/e (˜0.37) of peak light emission at 1 microsecond or less after excitation by an electron beam has ceased and having an emission efficiency in a thin film sensor equal to or greater than 25% of phosphor P-43.
Dependencies are inferred from the claim text.