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US 2019/0161570 A1Published application
Polymer compositions for self-assembly applications
AssigneeRidgefield Acquisition
InventorsHengpeng WU, Jian YIN, Guanyang LIN
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Abstract
The present invention relates to a composition comprises at least one random copolymer having at least one repeat unit of structure (1), The present invention also relates to novel processes for forming patterns using this novel crosslinked layer on a substrate by enable a film of a block copolymer coated on the novel crosslinked layer to undergo self-assembly.
Claims37
A composition comprising at least one random copolymer having at least one repeat unit of structure (1),
- where R1 is selected from a group consisting of H, C-1 to C-4 alkyl, a C-1 to C-4 fluoroalkyl, and a halide;
- and R2 is selected from the group consisting of H, F, C-1 to C-8 alkyl and a C-1 to C-8 fluoroalkyl and m ranges from 1 to 3 and G is a C-2 to C-10 alkylene moiety.
A monomer of structure (1′″)
- where R1c is selected from a group consisting of H, C-1 to C-4 alkyl, a C-1 to C-4 fluoroalkyl, and a halide;
- and R2c is selected from the group consisting of H, F, C-1 to C-8 alkyl and a C-1 to C-8 fluoroalkyl and m ranges from 1 to 3 and G1c is a C-2 to C-10 alkylene moiety.
A random copolymer having at least one repeat unit of structure (1),
- where R1 is selected from a group consisting of H, C-1 to C-4 alkyl, a C-1 to C-4 fluoroalkyl, and a halide;
- and R2 is selected from the group consisting of H, F, C-1 to C-8 alkyl and a C-1 to C-8 fluoroalkyl and m ranges from 1 to 3 and G is a C-2 to C-10 alkylene moiety.
Dependencies are inferred from the claim text.