Process for depositing a layer
AssigneePilkington Group Limited
InventorsKEVIN SANDERSON, GARY NICHOL, LIAM PALMER, PETER HARRIS, JACK BROWN, JUN NI, LILA R. DAHAL
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Abstract
A process for depositing on a surface of a substrate a layer based on a metal oxide doped with magnesium or a mixed metal oxide containing magnesium. The process includes providing a substrate having a surface, forming a gaseous mixture comprising a non-halogenated source of a metal and a source of magnesium, delivering the gaseous mixture to the surface of the substrate, and depositing the layer based on a metal oxide doped with magnesium or a mixed metal oxide containing magnesium on the surface of the substrate.
Claims17
A process for depositing on a surface of a substrate a layer based on a metal oxide doped with magnesium or a mixed metal oxide containing magnesium, said process comprising:
- providing a substrate having a surface,
- forming a gaseous mixture comprising a non-halogenated source of a metal and a source of magnesium,
- delivering the gaseous mixture to the surface of the substrate, and
- depositing the layer based on a metal oxide doped with magnesium or a mixed metal oxide containing magnesium on the surface of the substrate.
A method for the deposition of a layer based on a metal oxide doped with magnesium or a mixed metal oxide containing magnesium on a surface of a substrate, comprising utilizing a non-halogenated source of a metal.
Dependencies are inferred from the claim text.