Adhered object removal method

Abstract

A method for removing hard adhered objects is provided whereby adhered objects adhering to a jig in a film deposition process using crystal growth are efficiently removed while reducing damage to the jig. This adhered object removal method includes a step for preparing a jetting media with a lower hardness than the jig, a step for jetting the jetting media toward the jig, and a step for forming fracture starting points at the crystal grain boundary of the adhered object when the jetting media collides with the jig, then causing further collision of jetting media to cause the adhered object to dislodge at the crystal grain boundary.

Dependencies are inferred from the claim text.