Coating pattern formation method, coating pattern formation device, and coating-patterned substrate
AssigneeToray Engineering Co., Ltd.
InventorsKenichi SHIMATANI, Satoshi TOMOEDA
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AssigneeToray Engineering Co., Ltd.
InventorsKenichi SHIMATANI, Satoshi TOMOEDA
Estimating the term…
A coating pattern formation method includes adjusting lyophilicity of a pattern region provided on a substrate, and forming a coating pattern having a shape of the pattern region by applying a coating liquid to the pattern region after the adjusting of the lyophilicity of the pattern region. The lyophilicity of the pattern region is adjusted such that the pattern region is divided into a plurality of small pattern regions in at least one division direction, such that adjacent small pattern regions have different lyophilicity, such that a small pattern region spaced away from an end of the pattern region has the lowest lyophilicity among the small pattern regions in the at least one division direction, and such that the lyophilicity of the small pattern regions increases from the small pattern region having the lowest lyophilicity toward the end of the pattern region.
A coating pattern formation method in which a coating liquid comprising:
A coating pattern formation device comprising:
A coating-patterned substrate comprising:
Dependencies are inferred from the claim text.