Fluidic microelectromechanical sensors/devices and fabrication methods thereof
AssigneeEzmems Ltd.
InventorsTsvi SHMILOVICH, Nicola MOLINAZZI
Life of this patent
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Abstract
Structure and assembly of fluidic sensor devices are disclosed. A fluid sensor in some possible embodiments comprises a unitary/monolithic base body structure, or a base body structure assembled from two or more separate body elements configured to attach one to the other, and the base body structure having a fluid channel passing along the base body structure, an opening formed in said base body structure and fluidly communicating with the channel, and a sealing element comprising one or more sensing elements patterned thereon and sealably attached over the at least one opening such that its one or more sensing elements become located over the at least one opening.
Claims21
1-41. (canceled)
A fluidic sensor device comprising:
- a base body structure comprising a fluid cavity or channel passing therealong and at least one opening in an external face of said base body structure and being in fluid communication with said fluid channel or cavity;
- and
- a sealing element comprising one or more sensing elements a priori patterned or mounted thereon, said sealing element sealably attached over said external face of said base body structure comprising said at least one opening such that its one or more sensing elements become located over said at least one opening, said one or more sensing elements configured to measure at least one property or condition of a fluid substance when said fluid substance is introduced into said fluid channel or cavity and interact with a portion of said sealing element located over said at least one opening.
A method of constructing fluidic sensor device, the method comprising forming a base body structure comprising a fluid cavity or channel passing therealong and being in fluid communication with at least one opening in an external face of said base body structure, and attaching a sealing element comprising one or more sensing elements a priori patterned or mounted thereon over said external face of said base body structure comprising said at least one opening such that its one or more sensing elements become located over said at least one opening, said one or more sensing elements configured to measure at least one property or condition of a fluid substance when said fluid substance is introduced into said fluid channel or cavity and interact with a portion of said sealing element located over said at least one opening.
Dependencies are inferred from the claim text.