Extreme ultraviolet light generation method
AssigneeGigaphoton Inc.
InventorTatsuya YANAGIDA
Life of this patent
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Abstract
An extreme ultraviolet light generation method according to one aspect of the present disclosure includes outputting a droplet to a first laser light irradiation region that is a region different from a plasma generation region, irradiating the droplet that reaches the first laser light irradiation region with first laser light to generate a deformed liquid target, irradiating the deformed liquid target that reaches a second laser light irradiation region that is a region different from the plasma generation region with second laser light to generate a fragment jet target, and irradiating at least a part of the fragment jet target that reaches the plasma generation region with third laser light that propagates in a direction intersecting a propagation direction of the second laser light.
Claims20
An extreme ultraviolet light generation method comprising:
- a droplet output step of outputting a droplet to a first laser light irradiation region that is a region different from a plasma generation region;
- a deformed liquid target generation step of irradiating the droplet with first laser light to generate a deformed liquid target, the droplet being output in the droplet output step and reaching the first laser light irradiation region;
- a fragment jet target generation step of irradiating the deformed liquid target with second laser light to generate a fragment jet target, the deformed liquid target being generated in the deformed liquid target generation step and reaching a second laser light irradiation region that is a region different from the plasma generation region;
- and
- a third laser light irradiation step of irradiating at least a part of the fragment jet target with third laser light that propagates in a direction intersecting a propagation direction of the second laser light, the fragment jet target being generated in the fragment jet target generation step and reaching the plasma generation region.
Dependencies are inferred from the claim text.