Multi-zone pedestal heater having a routing layer

A support pedestal comprising:

• a plurality of resistive heating elements defining a plurality of heating zones;
• a routing layer including a central portion and a plurality of arm portions extending from the central portion;
• a main substrate disposed between the plurality of resistive heating elements and the routing layer;
• and
• a plurality of pairs of conductive vias extending through the main substrate and connected to the plurality of resistive heating elements,
• wherein each arm of the plurality of arm portions is connected to a corresponding pair of the conductive vias,
• wherein the number of heating zones is greater than or equal to a number of wires coupled to the routing layer.

A support pedestal comprising:

• a substrate having a first surface and a second surface;
• a first resistive layer having at least two zones and disposed on the first surface of the substrate;
• a second resistive layer having at least two zones and disposed on the second surface of the substrate;
• a routing layer disposed on the same plane as the second resistive layer;
• and
• a plurality of conductive vias adapted to electrically couple the routing layer to the first resistive layer;
• wherein the number of zones of at least one of the first resistive layer and the second resistive layers is greater than or equal to a number of wires coupled to the routing layer.