Piezoelectric driving device, piezoelectric motor, robot, electronic component conveyance apparatus, printer, and projector
AssigneeSeiko Epson Corporation
InventorsYutaka ARAKAWA, Akio KONISHI, Tomoaki TAKAHASHI
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Abstract
A piezoelectric driving device includes a first substrate having cleavability, and a piezoelectric element placed above the first substrate, wherein a cleavage direction of the first substrate and a direction in which a shear force is applied do not coincide in a plan view of the first substrate. Further, an angle formed by the cleavage direction of the first substrate and the direction in which the shear force is applied is equal to or larger than 20° in the plan view of the first substrate. Furthermore, the first substrate contains silicon single crystal.
Claims20
A piezoelectric driving device comprising:
- a first substrate having cleavability;
- and
- a piezoelectric element placed above the first substrate,
- wherein a cleavage direction of the first substrate and a direction in which a shear force is applied do not coincide in a plan view of the first substrate.
Dependencies are inferred from the claim text.