Three-degrees-of-freedom angle adjustment device driven by piezoelectric ceramics and adjusting method thereof

A three-degrees-of-freedom angle adjustment device driven by piezoelectric ceramics, comprising:

• a Z-direction deflection mechanism (1), an X-direction deflection mechanism (2), a Y-direction deflection mechanism (3), and a stage (4), which are sequentially connected;
• the Z-direction deflection mechanism (1) is located in an XOY plane as a device mounting base, the X-direction deflection mechanism (2) is located in a YOZ plane, and the Y-direction deflection mechanism (3) is located in an XOZ plane;
• wherein the Z-direction deflection mechanism (1) comprises a mounting substrate (1-1), a first pre-compressed piezoelectric stack actuator (1-2), a first Z-direction deflection beam (1-3), a second pre-compressed piezoelectric stack actuator (1-4), a Z-direction deflection block (1-5) and a second Z-direction deflection beam (1-6);
• the mounting substrate (1-1) is respectively connected to the first Z-direction deflection beam (1-3) and the second Z-direction deflection beam (1-6) by flexure hinges;
• the first Z-direction deflection beam (1-3) and the second Z-direction deflection beam (1-6) are connected to the Z-direction deflection block (1-5) through flexure hinges;
• two sides without the flexure hinges of the Z-direction deflection block (1-5) are mounting grooves;
• the first pre-compressed piezoelectric stack actuator (1-2) and the second pre-compressed piezoelectric stack actuator (1-4) are mounted in the mounting substrate (1-1) with one end embedded in the mounting substrate (1-1) and the other end respectively mounted through a flexure hinge in a groove where the second Z-direction deflection beam (1-6) and the first Z-direction deflection beam (1-3) are connected;
• wherein the X-direction deflection mechanism (2) comprises a frame cut from a single piece of metal and two piezoelectric stacks, which has a base (2-1) formed by an axially symmetric metal frame having an upward concave shape;
• an internal groove of the base (2-1) is used for mounting with the Y-direction deflection mechanism (3), and two internal top ends of the base (2-1) are connected to a first X-direction deflection beam (2-3) and a second X-direction deflection beam (2-5) through external flexure hinges;
• internal sides of the first X-direction deflection beam (2-3) and the second X-direction deflection beam (2-5) are connected to an X-direction deflection block (2-4) through internal flexure hinges;
• the X-direction deflection block (2-4) is a metal block with a downward concave shaped for mounting with a Y-direction deflection block (3-4) in the Y-direction deflection mechanism (3);
• a bottom of the base (2-1) has two protruding metal blocks which form a recessed mounting groove (2-8), so as to mount with the mounting grooves of the Z-direction deflection block (1-5) on the Z-direction deflection mechanism (1);
• bottoms of the first X-direction deflection beam (2-3) and the second X-direction deflection beam (2-5), which are near the base (2-1), are respectively provided with a metal cap connected by a bottom flexure hinge, for mounting the piezoelectric stacks and guiding;
• lower ends of a first X-direction piezoelectric stack (2-2 and a second X-direction piezoelectric stack (2-6) are mounted on the base (2-1), and upper ends are respectively connected to the first X-direction deflection beam (2-3) and the second X-direction deflection beam (2-5) by the metal cap;
• wherein the Y-direction deflection mechanism (3) comprises a frame cut from a single piece of metal and two piezoelectric stacks, which has a rigid base (3-1) with a bottom groove for positioning with a bottom groove of the X-direction deflection mechanism (2);
• the Y-direction deflection mechanism (3) and the X-direction deflection mechanism (2) are vertically mounted, and are ensured to cooperate by processing sizes;
• two internal top ends of the rigid base (3-1) are connected to a first Y-direction deflection beam (3-3) and a second Y-direction deflection beam (3-5) through external flexure hinges;
• ends of the first Y-direction deflection beam (3-3) and the second Y-direction deflection beam (3-5), which are near the rigid base (3-1), are connected to piezoelectric stack mounting caps by bottom flexure hinges;
• internal sides of the first Y-direction deflection beam (3-3) and the second Y-direction deflection beam (3-5) are connected to the Y-direction deflection block (3-4) by internal flexure hinges;
• the Y-direction deflection block (3-4) is a metal block with a groove on a top surface, and the groove is used for mounting the X-direction deflection block (2-4);
• lower ends of a first Y-direction piezoelectric stack (3-2) and a second Y-direction piezoelectric stack (3-6) are mounted on the rigid base (3-1), and upper ends are respectively mounted on the piezoelectric stack mounting caps of the first Y-direction deflection beam (3-3) and the second Y-direction deflection beam (3-5);
• wherein a top surface of the stage (4) is an object mounting plane, and a shape thereof is determined according to an object;
• a bottom of the stage (4) is an X-Y bidirectional groove, which is respectively connected to the X-direction deflection block (2-4) and the Y-direction deflection block (3-4);
• after mounting, the X-direction deflection block (2-4) and the Y-direction deflection block (3-4) are integrated.