Scanning antenna

A scanning antenna including a plurality of antenna units arranged therein, the scanning antenna comprising:

• a TFT substrate including:
• a first dielectric substrate;
• a plurality of TFTs supported by the first dielectric substrate;
• a plurality of gate bus lines;
• a plurality of source bus lines;
• and
• a plurality of patch electrodes connected to drains of the respective TFTs;
• a slot substrate including:
• a second dielectric substrate;
• and
• a slot electrode formed on a first main surface of the second dielectric substrate, the slot electrode including a plurality of slots disposed in correspondence with the patch electrodes;
• a liquid crystal layer disposed between the TFT substrate and the slot substrate;
• and
• a reflective conductive plate facing a second main surface of the second dielectric substrate with a dielectric layer interposed between the reflective conductive plate and the second main surface, the second main surface being opposite to the first main surface,
• wherein the TFT substrate further includes a transfer terminal section disposed in a non-transmission and/or reception region,
• the transfer terminal section includes a patch connection section formed of a same low-resistance metal film as that of a first low-resistance metal layer of the patch electrodes, a first protection metal layer formed on the patch connection section, and a first insulating layer including an opening partially exposing an upper face of the first protection metal layer,
• the slot substrate further includes a terminal section disposed in the non-transmission and/or reception region,
• the terminal section includes a slot connection section formed of a same low-resistance metal film as that of a second low-resistance metal layer of the slot electrode, a second protection metal layer formed on the slot connection section, and a second insulating layer including an opening partially exposing an upper face of the second protection metal layer, and
• the first and second protection metal layers are each formed of at least one layer selected from the group consisting of a Ti layer, a MoNb layer, a MoNbNi layer, a MoNbN layer, and a MoNbNiN layer, and have a thickness of 18 nm or greater.