Flexible array substrate and method for manufacturing same
AssigneeShenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorXiang LIU
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Abstract
The present disclosure provides a flexible array substrate and a method for manufacturing same. The flexible array substrate includes: a substrate; a gate electrode and a scan line disposed on the substrate; a first insulation layer disposed on the gate electrode and the scan line; an electrically conductive channel disposed on the first insulation layer; a source electrode, a drain electrode, and a data line disposed on the electrically conductive channel; a second insulation layer disposed on the source electrode, the drain electrode, and the data line; and a pixel electrode disposed on the second insulation layer.
Claims20
A method for manufacturing a flexible array substrate, comprising:
- providing a substrate;
- forming a first graphene layer on the substrate, and patterning the first graphene layer to form a gate electrode and a scan line;
- forming a first insulation layer on the substrate, the gate electrode, and the scan line;
- forming a metal-oxide-semiconductor layer on the first insulation layer, and patterning the metal-oxide-semiconductor layer to form an electrically conductive channel;
- forming a second graphene layer on the electrically conductive channel and the first insulation layer, and patterning the second graphene layer to form a source electrode, a drain electrode, and a data line, wherein the electrically conductive channel is connected to the source electrode and the drain electrode;
- forming a second insulation layer on the substrate, the source electrode, the drain electrode, and the data line;
- and
- forming a carbon nanotube layer on the second insulation layer, and patterning the carbon nanotube layer to form a pixel electrode;
- wherein the pixel electrode is electrically connected to the drain electrode via a through-hole;
- wherein the substrate is a transparent glass substrate or a plastic substrate;
- and
- wherein the first insulation layer includes a third insulation layer and a fourth insulation layer disposed on the third insulation layer;
- and the third insulation layer is made of an organic resin, and the fourth insulation layer is made of oxide, nitride, or oxynitride.
A method for manufacturing a flexible array substrate, comprising:
- providing a substrate;
- forming a first graphene layer on the substrate, and patterning the first graphene layer to form a gate electrode and a scan line;
- forming a first insulation layer on the substrate, the gate electrode, and the scan line;
- forming a metal-oxide-semiconductor layer on the first insulation layer, and patterning the metal-oxide-semiconductor layer to form an electrically conductive channel;
- forming a second graphene layer on the electrically conductive channel and the first insulation layer, and patterning the second graphene layer to form a source electrode, a drain electrode, and a data line, wherein the electrically conductive channel is connected to the source electrode and the drain electrode;
- forming a second insulation layer on the substrate, the source electrode, the drain electrode, and the data line;
- and
- forming a carbon nanotube layer on the second insulation layer, and patterning the carbon nanotube layer to form a pixel electrode, wherein the pixel electrode is electrically connected to the drain electrode via a through-hole.
A flexible array substrate, comprising:
- a substrate;
- a gate electrode and a scan line disposed on the substrate;
- a first insulation layer disposed on the gate electrode and the scan line;
- an electrically conductive channel disposed on the first insulation layer;
- a source electrode, a drain electrode, and a data line disposed on the electrically conductive channel;
- a second insulation layer disposed on the source electrode, the drain electrode, and the data line;
- and
- a pixel electrode disposed on the second insulation layer;
- wherein the electrically conductive channel is connected to the source electrode and the drain electrode, and the pixel electrode is electrically connected to the drain electrode via a through-hole;
- wherein the gate line and the scan line are formed from a patterned first graphene layer;
- the electrically conductive channel is formed from a patterned metal-oxide-semiconductor layer;
- the source electrode, the drain electrode, and the data line are formed from a patterned second graphene layer;
- and the pixel electrode is formed from a patterned carbon nanotube layer.
Dependencies are inferred from the claim text.