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US 2019/0157416 A1Published application
Single column compound semiconductor bipolar junction transistor fabricated on iii-v compound semiconductor surface
AssigneeInternational Business Machines Corporation
InventorsKarthik Balakrishnan, Pouya Hashemi, Tak H. Ning, Alexander Reznicek
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Abstract
A vertical, single column compound semiconductor bipolar junction transistor device includes an all-around extrinsic base. Homojunction and heterojunction devices are formed using III-V compound semiconductor materials with appropriate bandgaps. Fabrication of the transistor device includes epitaxially growing a III-V compound semiconductor base region on a heavily doped III-V compound semiconductor bottom layer. A polycrystalline emitter/collector layer and the all-around extrinsic base are grown on the base region.
Claims11
A single column bipolar junction transistor device, comprising:
- a substrate including a III-V compound semiconductor surface;
- an isolation layer on the III-V compound semiconductor surface;
- a vertical column on the isolation layer, wherein the vertical column is defined by perimetrical sides, the vertical column including:
- a bottom semiconductor layer having a first conductivity type, the bottom semiconductor layer consisting essentially of a heavily doped, epitaxially grown III-V compound semiconductor material, the isolation layer being between the III-V compound semiconductor surface and the bottom semiconductor layer,
- a top semiconductor layer consisting essentially of a heavily doped, III-V compound semiconductor material, the top semiconductor layer having the first conductivity type, and
- a doped, III-V compound semiconductor base layer having a second conductivity type opposite to the first conductivity type, the base layer being epitaxial to the bottom semiconductor layer and located between and directly contacting the bottom and top semiconductor layers;
- and
- a doped extrinsic base completely surrounding the perimetrical sides and directly contacting the base layer, and a base contact electrically connected to the doped extrinsic base.
5 more elements
A single column bipolar junction transistor device, comprising:
- a substrate including a III-V compound semiconductor surface;
- an isolation layer on the III-V compound semiconductor surface;
- a vertical column on the isolation layer, the vertical column including:
- a bottom semiconductor layer having a first conductivity type, the bottom semiconductor layer being heavily doped and consisting essentially of an epitaxially grown III-V compound semiconductor material, the isolation layer being between the III-V compound semiconductor surface and the bottom semiconductor layer,
- a top semiconductor layer consisting essentially of a III-V compound semiconductor material, the top semiconductor layer being heavily doped and having the first conductivity type, and
- a doped III-V compound semiconductor base layer having a second conductivity type opposite to the first conductivity type, the base layer being epitaxial to the bottom semiconductor layer and located between and directly contacting the bottom and top semiconductor layers;
- and
- a doped extrinsic base completely surrounding and directly contacting the base layer, and a base contact electrically connected to the doped extrinsic base;
- wherein the doped extrinsic base comprises a polycrystalline semiconductor material and the III-V compound semiconductor material of top semiconductor layer includes a polycrystalline structure.
6 more elements
A single column bipolar junction transistor device, comprising:
- a substrate including a III-V compound semiconductor surface;
- an isolation layer on the III-V compound semiconductor surface;
- a vertical column on the isolation layer, the vertical column including:
- a bottom semiconductor layer having a first conductivity type, the bottom semiconductor layer being heavily doped and consisting essentially of an epitaxially grown III-V compound semiconductor material, the isolation layer being between the III-V compound semiconductor surface and the bottom semiconductor layer,
- a top semiconductor layer consisting essentially of a III-V compound semiconductor material, the top semiconductor layer being heavily doped and having the first conductivity type, and
- a doped III-V compound semiconductor base layer having a second conductivity type opposite to the first conductivity type, the base layer being epitaxial to the bottom semiconductor layer and located between and directly contacting the bottom and top semiconductor layers;
- a doped extrinsic base completely surrounding and directly contacting the base layer, and a base contact electrically connected to the doped extrinsic base;
- a top dielectric spacer on a top surface of the doped extrinsic base, the top dielectric spacer electrically insulating the doped extrinsic base from the top semiconductor layer, and
- a bottom dielectric spacer on a bottom surface of the doped extrinsic base, the bottom dielectric spacer electrically insulating the doped extrinsic base from the bottom semiconductor layer.
6 more elements
-20. (canceled)
Dependencies are inferred from the claim text.