Oxide semiconductor film and method for producing same
AssigneeFlosfia Inc.
InventorsTomochika TANIKAWA, Toshimi HITORA
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Abstract
A new and useful oxide semiconductor film with enhanced p-type semiconductor property and the method of manufacturing the oxide semiconductor film are provided. A method of manufacturing an oxide semiconductor film including: generating atomized droplets by atomizing a raw material solution containing a metal of Group 9 of the periodic table and/or a metal of Group 13 of the periodic table and a p-type dopant; carrying the atomized droplets onto a surface of a base by using a carrier gas; causing a thermal reaction of the atomized droplets adjacent to the surface of the base under oxygen atmosphere to form the oxide semiconductor film on the base.
Claims20
An oxide semiconductor film comprising:
- a metal oxide as a major component comprising a metal of Group 9 of the periodic table and/or a metal of Group 13 of the periodic table;
- a p-type dopant in the oxide semiconductor film;
- a p-type carrier concentration of the oxide semiconductor film being 1×1015/cm3 or more;
- and
- hole mobility of the oxide semiconductor film being 1 cm2/Vs or more.
A method of manufacturing an oxide semiconductor film comprising:
- generating atomized droplets by atomizing a raw material solution comprising a metal of Group 9 of the periodic table and/or a metal of Group 13 of the periodic table and a p-type dopant;
- carrying the atomized droplets onto a surface of a base by using a carrier gas;
- and
- causing a thermal reaction of the atomized droplets adjacent to the surface of the base under an atmosphere of oxygen to form the oxide semiconductor film on the base.
An oxide semiconductor film comprising:
- a metal oxide as a major component comprising a metal of Group 9 of the periodic table and/or a metal of Group 13 of the periodic table;
- a p-type dopant in the oxide semiconductor film;
- hole mobility of the oxide semiconductor film being 1 cm2/Vs or more.
Dependencies are inferred from the claim text.