Image sensor including splitter
AssigneeSamsung Electronics Co., Ltd.
InventorsJung-Hun KIM, Sang-Su PARK, Chang-Hwa KIM, Hyung-Yong KIM, Beom-Suk LEE, Man-Geun CHO, Jae-Sung HUR
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Abstract
An image sensor includes a plurality of photo diodes disposed at a semiconductor substrate, and a splitter disposed on the photo diodes. The splitter splits an incident light depending on a wavelength so that split light of different colors enters different photo diodes, respectively. The splitter includes a first pattern structure having a cross-sectional structure in which a plurality of refractive layer patterns are deposited in a lateral direction.
Claims25
An image sensor comprising:
- a plurality of photo diodes disposed at a semiconductor substrate;
- and
- a splitter disposed on the photo diodes and splitting an incident light depending on a wavelength so that split light of different colors enters different photo diodes, respectively,
- wherein the splitter includes a first pattern structure having a cross-sectional structure in which a plurality of refractive layer patterns are disposed adjacent to each other in a lateral direction.
An image sensor comprising:
- a plurality of photo diodes respectively disposed in unit pixel regions of a semiconductor substrate;
- and
- a splitter disposed on a first surface of the semiconductor substrate and spaced apart from the photo diodes, the splitter splitting an incident light depending on a wavelength so that split light of different colors enters different photo diodes, respectively;
- and
- wherein the splitter includes a first pattern structure in which a boundary extending in a vertical direction is formed between two of a plurality of refractive layer patterns.
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An image sensor comprising:
- a plurality of photo diodes respectively disposed in unit pixel regions of a semiconductor substrate;
- and
- a splitter disposed on a first surface of the semiconductor substrate and spaced apart from the photo diodes, the splitter splitting an incident light depending on a wavelength so that split light of different colors enters different photo diodes, respectively,
- wherein the splitter consists of a first refractive pattern structure having a cross-sectional structure in which a plurality of refractive layer patterns are stacked in a lateral direction with respect to each other.
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Dependencies are inferred from the claim text.