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US 2019/0157329 A1Published application
Image sensor and method of fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorsHong Ki KIM, Jung Chak Ahn, In Sung Joe
Life of this patent
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Abstract
An image sensor and a method of fabricating the same are provided. The image sensor includes a substrate including photoelectric elements, a first color filter disposed on the substrate, a second color filter disposed on the substrate to be adjacent to the first color filter, a covering film disposed between sidewalls of the first and second color filters, and an air gap formed in the covering film.
Claims20
An image sensor comprising:
- a substrate including photoelectric elements;
- a first color filter on the substrate;
- a second color filter on the substrate adjacent to the first color filter with an air gap inbetween;
- and
- a covering film between sidewalls of the first and second color filters.
2 more elements
An image sensor comprising:
- a substrate including photoelectric elements;
- a color filter on the substrate and having a first sidewall, a second sidewall, which crosses the first sidewall, a third sidewall, opposite to the first sidewall, and a fourth sidewall, opposite to the second sidewall;
- and
- a covering film on the first, second, third, and fourth sidewalls, the covering film having first, second, third, and fourth air gaps along the first, second, third, and fourth sidewalls, respectively.
1 more element
An image sensor comprising:
- a substrate including photoelectric elements;
- a first color filter on the substrate and including a first sidewall;
- a second color filter on the substrate and including a second sidewall, opposite to the first sidewall;
- and
- a covering film between the first and second sidewalls, the covering film having a void.
2 more elements
Dependencies are inferred from the claim text.