Vertical memory devices and methods of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsKohji KANAMORI, Young-Hwan SON, Byung-Kwan YOU, Eun-Taek JUNG
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AssigneeSamsung Electronics Co., Ltd.
InventorsKohji KANAMORI, Young-Hwan SON, Byung-Kwan YOU, Eun-Taek JUNG
Estimating the term…
A vertical memory device includes first, second and third impurity regions sequentially stacked in a first direction substantially perpendicular to an upper surface of a substrate, a gate electrode structure including gate electrodes spaced apart from each other in the first direction on the third impurity region, a channel extending through the gate electrode structure, the second and third impurity regions, and an upper portion of the first impurity region on the substrate in the first direction, and a charge storage structure covering a portion of an outer sidewall and a lower surface of the channel. The channel directly contacts a sidewall of the second impurity region.
A vertical memory device, comprising:
(canceled)
A vertical memory device, comprising:
-26. (canceled)
A vertical memory device, comprising:
-54. (canceled)
Dependencies are inferred from the claim text.