Semiconductor memory device including a capacitor
AssigneeSamsung Electronics Co., Ltd.
InventorsCHANHO KIM, PANSUK KWAK, CHAEHOON KIM, HONGSOO JEON, JEUNGHWAN PARK, BONGSOON LIM
Life of this patent
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Abstract
At least one latch of a page buffer of a nonvolatile memory device includes a capacitor that selectively stores a voltage of a sensing node. The capacitor includes at least one first contact having a second height corresponding to a first height of each of cell strings, and at least one second contact to which a ground voltage is supplied. The at least one second contact has a third height corresponding to the first height, disposed adjacent to the at least one first contact, and electrically separated from the at least one first contact.
Claims20
A nonvolatile memory device comprising:
- a memory cell array formed in a first area of a substrate;
- and
- a page buffer circuit formed in a second area of the substrate and connected to the memory cell array through bit lines,
- wherein the memory cell array comprises cell strings, each of the cell strings comprising nonvolatile memory cells stacked in a direction perpendicular to the substrate,
- wherein the page buffer circuit comprises page buffers respectively corresponding to the bit lines, wherein each of the page buffers comprises
- latches connected to a sensing node, and
- a selection circuit configured to selectively connect the sensing node to a corresponding bit line of the bit lines,
- wherein at least one latch of the latches comprises a capacitor configured to selectively store a voltage of the sensing node,
- wherein the capacitor comprises
- at least one first contact to which the voltage of the sensing node is selectively supplied, the at least one first contact having a second height corresponding to a first height of each of the cell strings, and
- at least one second contact to which a ground voltage is supplied, the at least one second contact having a third height corresponding to the first height, disposed adjacent to the at least one first contact, and electrically separated from the at least one first contact.
A nonvolatile memory device comprising:
- a memory cell array formed in a first area of a substrate;
- and
- a page buffer circuit formed in a second area of the substrate and connected to the memory cell array through bit lines,
- wherein the memory cell array comprises cell strings, each of the cell strings comprising nonvolatile memory cells stacked in a direction perpendicular to the substrate,
- wherein the page buffer circuit comprises page buffers respectively corresponding to the bit lines,
- wherein each of the page buffers comprises
- latches connected to a sensing node,
- a selection circuit configured to selectively connect the sensing node to a corresponding bit line of the bit lines, and
- a capacitor connected to the sensing node, and
- wherein the capacitor comprises
- at least one first contact to which a sensing voltage of the sensing node is supplied, the at least one first contact having a second height corresponding to a first height of each of the cell strings;
- and
- at least one second contact to which a ground voltage is supplied, the at least one second contact having a third height corresponding to the first height, disposed adjacent to the at least one first contact, and electrically separated from the at least one first contact.
A nonvolatile memory device comprising:
- a memory cell array formed in a first area of a substrate;
- and
- a page buffer circuit formed in a second area of the substrate and connected to the memory cell array through bit lines,
- wherein the memory cell array comprises cell strings, each of the cell strings comprising nonvolatile memory cells stacked in a direction perpendicular to the substrate,
- wherein the page buffer circuit comprises page buffers respectively corresponding to the bit lines,
- wherein each of the page buffers comprises
- latches connected to a sensing node,
- a selection circuit configured to selectively connect the sensing node to a corresponding bit line of the bit lines, and
- a capacitor configured to provide a capacitance to each of the page buffers,
- wherein the capacitor comprises
- at least one first contact having a second height corresponding to a first height of each of the cell strings, and
- at least one second contact to which a ground voltage is supplied, the at least one second contact having a third height corresponding to the first height, disposed adjacent to the at least one first contact, and electrically separated from the at least one first contact.
Dependencies are inferred from the claim text.