Three-dimensional semiconductor memory devices and methods of fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorsEUNTAEK JUNG, Joongshik Shin
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AssigneeSamsung Electronics Co., Ltd.
InventorsEUNTAEK JUNG, Joongshik Shin
Estimating the term…
Three-dimensional semiconductor memory devices and methods of fabricating the same are provided. A memory device may include a semiconductor layer including first and second regions, first vertical structures on the first region and extending in a first direction perpendicular to a top surface of the semiconductor layer, and second vertical structures on the second region and extending in the first direction. The first vertical structure may include a vertical semiconductor pattern extending in the first direction and in contact with the semiconductor layer, and a first data storage pattern surrounding the vertical semiconductor pattern. The second vertical structure may include an insulation structure extending in the first direction and in contact with the semiconductor layer, and a second data storage pattern surrounding the insulation structure.
A three-dimensional semiconductor memory device, comprising:
A three-dimensional semiconductor memory device, comprising:
16-19. (canceled)
25-34. (canceled)
Dependencies are inferred from the claim text.