US 2019/0157275 A1 · SEMICONDUCTOR DEVICES

Abstract

A semiconductor device includes a plurality of conductive structures arranged on a substrate and spaced apart from each other in a second direction substantially perpendicular to a first direction, in which each of the plurality of conductive structures extends in the first direction. A plurality of contact structures are arranged between the conductive structures in an alternating arrangement and spaced apart from each other in the first direction. A plurality of insulation structures are arranged in a space between the conductive structures and between the contact structures. A plurality of air spacers are arranged between the alternating arrangement of the plurality of conductive structures and the plurality of contact structures, respectively and spaced apart from each other in the first direction.

Claims20

Dependent claims

A semiconductor device, comprising:

a plurality of conductive structures arranged on a substrate and spaced apart from each other in a second direction substantially perpendicular to a first direction, each of the plurality of conductive structures extending in the first direction;
a plurality of contact structures arranged between the conductive structures in an alternating arrangement and spaced apart from each other in the first direction;
a plurality of insulation structures, each one of the insulation structures arranged in a space between the alternating arrangement of the conductive structures and the contact structures;
and
spacers arranged between the alternating arrangement of the conductive structures and the contact structures, respectively and the spacers are spaced apart from each other in the first direction.

2 more elements

A semiconductor device, comprising:

a plurality of conductive structures arranged on a substrate and spaced apart from each other in a second direction substantially perpendicular to a first direction, each of the plurality of conductive structures extending in the first direction, each of the plurality of the conductive structures including a conductive pattern and a first mask pattern stacked on each other;
a plurality of contact structures arranged between the conductive structures in an alternating arrangement to contact a surface of the substrate and the plurality of contact structures spaced apart from each other in the first direction;
a plurality of insulation structures, each one of the insulation structures arranged in a space between the alternating arrangement of the plurality of conductive structures and the plurality of contact structures, each of the plurality of insulation structures including an air gap therein;
and
air spacers arranged between a lower portion of the plurality of conductive structures and the plurality of contact structures, respectively;
and
wherein the air spacers and the air gap face a conductive pattern of the conductive structure.

4 more elements

Dependencies are inferred from the claim text.

Semiconductor devices

Life of this patent

Semiconductor devices

Life of this patent

Abstract

Claims20