Semiconductor Device Including an Integrated Resistor

A semiconductor device, comprising:

• a transistor device in a semiconductor die including a semiconductor body, the transistor device comprising transistor cells connected in parallel and covering at least 80% of an overall active area at a first surface of the semiconductor body;
• a control terminal contact area at the first surface electrically connected to a control electrode of each of the transistor cells;
• a first load terminal contact area at the first surface electrically connected to a first load terminal region of each of the transistor cells;
• and
• a resistor in the semiconductor die and electrically coupled between the control terminal contact area and the first load terminal contact area, the resistor being at least partly arranged in a trench and electrically insulated from a surrounding part of the semiconductor body by a trench dielectric.

A semiconductor device, comprising:

• a transistor device in a semiconductor die including a semiconductor body, the transistor device comprising transistor cells connected in parallel and covering at least 80% of an overall active area at a first surface of the semiconductor body;
• a control terminal contact area at the first surface electrically connected to a control electrode of each of the transistor cells;
• a first load terminal contact area at the first surface electrically connected to a first load terminal region of each of the transistor cells;
• a resistor in the semiconductor die and electrically coupled between the control terminal contact area and the first load terminal contact area, wherein a current path from the control terminal contact area via the resistor to the first load terminal contact area is configured to discharge a gate of the transistor device at a failure mode of interruption of gate voltage supply;
• and
• a pn junction diode electrically connected in series with the resistor,
• wherein the resistor or the pn junction diode laterally extends between the control terminal contact area or below a control terminal interconnection line and the first load terminal contact area,
• wherein the resistor is electrically connected to the control terminal contact area or the control terminal interconnection line via a contact,
• wherein an electrical resistance of the resistor is set by a position of the contact along a lateral extension of the resistor below the control terminal contact area or below the control terminal interconnection line.