Semiconductor logic device and system and method of embedded packaging of same
AssigneeGeneral Electric Company
InventorsRaymond Albert Fillion, Kaustubh Ravindra Nagarkar
Life of this patent
Estimating the term…
Abstract
A reconfigured semiconductor device includes a semiconductor device comprising an active surface having a plurality of input/output (I/O) pads spaced at a non-solderable pitch thereon and at least one redistribution layer overlying the active surface of the semiconductor device. Each at least one redistribution layer includes an insulating layer and a patterned conductive layer comprising a plurality of discrete terminal pads formed on the insulating layer, each of the plurality of discrete terminal pads electrically coupled to a respective I/O pad of the plurality of I/O pads by a conductive via formed through the insulating layer.
Claims30
A reconfigured semiconductor device comprising:
- a semiconductor device comprising an active surface having a plurality of input/output (I/O) pads spaced at a non-solderable pitch thereon;
- and
- at least one redistribution layer overlying the active surface of the semiconductor device, each at least one redistribution layer comprising:
- an insulating layer;
- and
- a patterned conductive layer comprising a plurality of discrete terminal pads formed on the insulating layer, each of the plurality of discrete terminal pads electrically coupled to a respective I/O pad of the plurality of I/O pads by a conductive via formed through the insulating layer.
A method of manufacturing a reconfigured semiconductor device comprising:
- disposing an insulating layer over an active surface of a semiconductor logic device, the active surface comprising a plurality of input/output (I/O) pads arranged in a uniform grid at a non-solderable pitch;
- forming a plurality of vias through the insulating layer;
- disposing a layer of conductive material on an outer surface of the insulating layer, into the plurality of vias, and onto the plurality of I/O pads;
- and
- patterning the layer of conductive material to form a plurality of discrete terminal pads, each discrete terminal pad electrically coupled to a respective I/O pad of the plurality of I/O pads.
An embedded electronics package comprising:
- an insulating material;
- a reconfigured semiconductor device embedded within a cavity of the insulating material, the reconfigured semiconductor device comprising:
- a semiconductor device comprising a plurality of input/output (I/O) pads having a pitch less than a minimum pitch for solder bump attachment;
- and
- a redistribution layer comprising:
- a redistribution insulating layer disposed atop the semiconductor device;
- and
- a plurality of terminal connections each comprising a conductive pad formed on the redistribution insulating layer and a conductive via extending through the redistribution insulating layer to couple a respective conductive pad to a respective I/O pad of the plurality of I/O pads;
- and
- at least one interconnect layer overlying the reconfigured semiconductor device and a first surface of the insulating material, the at least one interconnect layer comprising:
- an interconnect insulating layer;
- and
- a conductive wiring layer formed on the interconnect insulating layer and extending into a plurality of vias therein to electrically couple with the plurality of terminal connections.
A method of manufacturing an embedded electronics package comprising:
- embedding a reconfigured semiconductor device within an insulating material, the reconfigured semiconductor device comprising a semiconductor device having a plurality of input/output (I/O) pads arranged in a uniform grid at a non-solderable pitch, an insulating layer disposed on the semiconductor device, and a plurality of discrete terminal pads formed on an outer surface of the insulating layer and electrically coupled to respective I/O pads of the plurality of I/O pads through the insulating layer;
- and
- forming an overlay interconnect structure atop the reconfigured semiconductor device and a first surface of the insulating material, the overlay interconnect structure comprising an overlay insulating layer and a patterned conductive wiring layer extending through the at least one overlay insulating layer to contact the plurality of discrete terminal pads of the reconfigured semiconductor device.
A semiconductor logic device comprising:
- a semiconductor base substrate;
- and
- an area array of input/output (I/O) pads formed on a surface of the semiconductor base substrate at a non-solderable pitch, the area array comprising a plurality of signal I/O pads, a plurality of power I/O pads, and a plurality of ground I/O pads.
An embedded electronics package comprising:
- an insulating material;
- a semiconductor logic device embedded within a cavity of the insulating material, the semiconductor logic device comprising:
- a semiconductor base substrate;
- and
- an area array of input/output (I/O) pads formed on a surface of the semiconductor base substrate at a non-solderable pitch, the area array comprising a plurality of signal I/O pads, a plurality of power I/O pads, and a plurality of ground I/O pads;
- and
- at least one interconnect layer overlying the semiconductor logic device and a first surface of the insulating material, the at least one interconnect layer comprising:
- an interconnect insulating layer;
- and
- a conductive wiring layer formed on the interconnect insulating layer and extending into a plurality of vias therein to electrically couple with the plurality of signal I/O pads, the plurality of power I/O pads, and the plurality of ground I/O pads.
Dependencies are inferred from the claim text.