Ceramic pedestal having atomic protective layer
AssigneeWatlow Electric Manufacturing Company
InventorMohammad NOSRATI
Life of this patent
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Abstract
A method of manufacturing a pedestal includes having a support plate including a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, preparing a tubular shaft that defines a chamber, securing the tubular shaft to the support plate, the conductive member being exposed in the chamber of the tubular shaft, and applying a protective layer on the conductive member by an atomic layer deposition (ALD) process. A system for manufacturing the pedestal and a pedestal are also provided in the present disclosure.
Claims20
A method of manufacturing a support pedestal, comprising:
- preparing a support plate including a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element;
- preparing a tubular shaft that defines a chamber;
- securing the tubular shaft to the support plate, the conductive member being exposed in the chamber of the tubular shaft;
- and
- applying a protective layer on the conductive member by an atomic layer deposition (ALD) process.
A system for manufacturing a pedestal, the pedestal including a support plate and a tubular shaft secured to the support plate, the system comprising:
- a first precursor source in fluid communication with a chamber of the tubular shaft;
- a second precursor source in fluid communication with the chamber of the tubular shaft;
- and
- a heating means for heating the pedestal.
A pedestal comprising:
- a support plate including a substrate and an electric element;
- a tubular shaft defining a chamber and secured to the support plate, a portion of the electric element being exposed in the chamber;
- and
- a protective layer applied on the portion of the electric element that is exposed in the chamber.
Dependencies are inferred from the claim text.