Article transferring method in semiconductor fabrication
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJheng-Si SU, Yu-Chen WEI, Chih-Yuan YANG, Shih-Ho LIN, Jen-Chieh LAI
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Abstract
A method for transporting an article used in semiconductor fabrication is provided. The method includes moving a first transporter next to an article to have the article faces a plurality of gas holes formed on the first transporter. The method further includes suspending the article with the first transporter in a non-contact manner by providing a flow of gas through the gas holes of the first transporter. The method also includes transferring the article with the first transporter while the flow of gas is continuously provided.
Claims20
A method for transporting an article used in semiconductor fabrication, comprising:
- moving a first transporter next to an article to have the article faces a plurality of gas holes formed on the first transporter;
- suspending the article with the first transporter in a non-contact manner by providing a flow of gas through the gas holes of the first transporter;
- and
- transferring the article with the first transporter while the flow of gas is continuously provided.
A transporter used for transporting an article in semiconductor fabrication, comprising:
- a robotic arm;
- two platens connected to the robotic arm and each having an inner surface facing the other, wherein a plurality of gas holes are formed on each of the inner surfaces of the two platens;
- and
- a gas supplier placed in communication with the gas holes and configured to control the flow of gas through the gas holes.
A transporter used for transporting an article used in semiconductor fabrication, comprising:
- an upper carriage and a lower carriage arranged in a predetermined plane and each having a lateral surface facing the other, wherein a first group of gas holes is formed on each of the lateral surfaces of the upper carriage and the lower carriage;
- two platens positioned at two opposite sides of the predetermined plane and each having an inner surface facing the other, wherein a second group of gas holes is formed on the inner surfaces of the two platens;
- a lower track configured to facilitate movement of the lower carriage;
- an upper track configured to facilitate movement of the upper carriage;
- and
- a plurality of gas suppliers placed in communication with the first group of gas holes and the second group of gas holes and configured to control a flow of gas through the first group of gas holes and the second group of gas holes.
Dependencies are inferred from the claim text.