Method of forming conductive grid of integrated circuit

A method of forming an integrated circuit:

• forming a conductive grid on a semiconductor substrate, wherein the conductive grid has a plurality of continuous conductive lines arranged in a first direction on a first conductive layer and a plurality of non-continuous conductive lines arranged in a second direction on a second conductive layer;
• selecting a plurality of first conductive lines from the plurality of non-continuous conductive lines;
• selecting a plurality of second conductive lines from the plurality of non-continuous conductive lines;
• and
• replacing the plurality of second conductive lines by a plurality of third conductive lines respectively when the plurality of first conductive lines and the plurality of second conductive lines are assigned to a first mask, wherein the plurality of third conductive lines is assigned to a second mask different from the first mask layer.

A system, comprising:

• at least one processor, configured to execute program instructions which configure the at least one processor as a processing tool that perform operations comprising:
• forming, by the processing tool, a conductive grid on a semiconductor substrate, wherein the conductive grid has a plurality of continuous conductive lines arranged in a first direction on a first conductive layer and a plurality of non-continuous conductive lines arranged in a second direction on a second conductive layer;
• selecting, by the processing tool, a first conductive line and a second conductive line from the plurality of non-continuous conductive lines, wherein a space between the first conductive line and the second conductive line has a first width;
• selecting, by the processing tool, a third conductive line and a fourth conductive line from the plurality of non-continuous conductive lines, wherein the space between the third conductive line and the fourth conductive line has a second width;
• and
• replacing, by the processing tool, the third conductive line and the fourth conductive line by a fifth conductive line and a sixth conductive line respectively, wherein the space between the fifth conductive line and the sixth conductive line has the first width, and the second width is greater than the first width.