System and method for scheduling semiconductor lot to fabrication tool

A method of dispatching a lot, wherein the lot is assigned to be processed by a first fabrication tool for a fabrication process, comprising:

• loading an inspection data corresponding to the lot from a statistical process control (SPC) chart via a network;
• determining whether the inspection data exceeds a release rule;
• and
• assigning and dispatching the lot to a second fabrication tool instead of the first fabrication tool for the fabrication process when determined that the inspection data does not exceed the release rule.

A system, comprising:

• at least one memory including computer program code for one or more programs;
• and
• at least one processor, configured to load the computer program code from the at least one memory, wherein the computer program code causes the at least one processor to:
• load inspection data corresponding to a lot that is assigned to be processed by a first fabrication tool for a fabrication process from a statistical process control (SPC) chart via a network;
• determine whether the inspection data exceeds a release rule;
• and
• assign and dispatch the lot to a second fabrication tool instead of the first fabrication tool for the fabrication process when determined that the inspection data does not exceed the release rule.