Methods and apparatuses for protecting a seal in a pressure vessel of a photolithography system
AssigneeASML Netherlands B.V.
InventorsDavid Bessems, Jon David Tedrow, Colin Michael Odneal
Life of this patent
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Abstract
A vessel having a seal that is protected from the liquid material within the vessel by a volume of gas. The vessel has a partition that divides the vessel into two volume spaces such that the seal that is in gaseous communication with the first volume space is protected from the liquid material in the second volume space by a volume of gas in the first volume space.
Claims20
Apparatus comprising:
- a first coupling subassembly extending in an axial direction, the first coupling subassembly including a fitting arranged at an axial end of the first coupling subassembly;
- and
- a rotational coupling element rotatably surrounding the first coupling subassembly and adapted to be engaged with the fitting such that the rotational coupling element is rotatable with respect to the fitting but axially engageable with the fitting to apply an axial compressive force to the fitting,
- the fitting having a face with a first configuration such that when the fitting is received in a second fitting when the fitting and the second fitting are brought into axial engagement by rotation of the rotational coupling element, the fitting and the second fitting at least partially rotationally engage to inhibit axial rotation of the fitting with respect to the second fitting.
Apparatus comprising:
- a first rotational coupling element;
- a first fitting adapted to be axially engaged with the first rotational coupling element;
- a second rotational coupling element;
- a second fitting adapted to be axially engaged with the second rotational coupling element and with the first fitting;
- the first fitting having a first configuration and the second fitting having a second configuration, the first and second configurations being such that the first fitting is received in the second fitting when the first fitting and the second fitting are brought into axial engagement by relative rotation of the first and second rotational coupling elements, the first fitting and the second fitting at least partially rotationally engage to prevent axial rotation of the first fitting with respect to the second fitting.
Apparatus comprising a first fitting having an insert with a first configuration, the insert being dimensioned to be insertable into an aperture in a second fitting, the aperture having a second configuration which is complementary to the first configuration, the first configuration and the second configuration being such that the insert is not rotatable with respect to the aperture when the insert is inserted into the aperture.
Dependencies are inferred from the claim text.