Monitoring device
OwnerHendrik Specht, Alexander Ehlert +1inventors
InventorsHendrik Specht, Alexander Ehlert, Christoph Puttmann
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Abstract
A monitoring device for movement monitoring for at least one MEMS actuator having at least one detection unit, which is set up to detect at least one movement signal of the MEMS actuator that includes at least one characteristic movement value of the at least one MEMS actuator. It is provided that the monitoring device includes at least one first comparator unit, which is set up to compare the at least one characteristic movement value of the at least one MEMS actuator to at least one reference value.
Claims10
A monitoring device for movement monitoring for at least one MEMS actuator, comprising:
- at least one detection unit which is configured to detect at least one movement signal of the MEMS actuator that includes at least one characteristic movement value of the at least one MEMS actuator;
- and
- at least one first comparator unit which is configured to compare the at least one characteristic movement value of the at least one MEMS actuator to at least one reference value.
A method for movement monitoring for at least one MEMS actuator with the aid of a monitoring device, wherein the monitoring device has at least one detection unit, which is configured to detect at least one movement signal of the MEMS actuator that includes at least one characteristic movement value of the at least one MEMS actuator, the method comprising:
- comparing the at least one characteristic movement value of the at least one MEMS actuator to at least one reference value.
A laser projection device, comprising:
- at least one MEMS actuator;
- and
- at least one monitoring device which includes at least one detection unit which is configured to detect at least one movement signal of the MEMS actuator that includes at least one characteristic movement value of the at least one MEMS actuator;
- wherein the at least one MEMS actuator is at least partially developed as a mirror element.
A laser projector including a laser projection device, the laser projection device comprising:
- at least one MEMS actuator;
- and
- at least one monitoring device which includes at least one detection unit which is configured to detect at least one movement signal of the MEMS actuator that includes at least one characteristic movement value of the at least one MEMS actuator;
- wherein the at least one MEMS actuator is at least partially developed as a mirror element.
Dependencies are inferred from the claim text.