Method and apparatus for manufacturing an alignment film
AssigneeShenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorWei REN
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Abstract
The present disclosure provides a method and an apparatus for manufacturing an alignment film. The method may include: forming an alignment material layer on a substrate; moving the substrate at a first speed and irradiating perpendicularly the alignment material layer with a first light emitted by a light source; moving the substrate at a second speed and irradiating the alignment material layer with a second light emitted by the light source, wherein a first angle between an incident direction of the second light and the substrate may prevent interference of an incident light and a reflected light of the alignment material layer. Therefore, the implementation of the present disclosure may improve the uniformity of the alignment capacity of the alignment film.
Claims16
A method for manufacturing an alignment film, comprising:
- forming an alignment material layer on a substrate;
- measuring thicknesses of different portions of the alignment material layer;
- determining a first angle based on the thicknesses of the different portions of the alignment material layer, wherein the first angle prevents interference of a first incident light and a first reflected light of the alignment material layer;
- moving the substrate in a first direction at a first speed and irradiating the alignment material layer with a first light from a light source, wherein the first light is perpendicular to the substrate;
- moving the substrate in the first direction at a second speed and irradiating the alignment material layer with a second light from the light source, wherein an angle between the first incident direction of the second light and the substrate is equal to the first angle;
- moving the substrate in the first direction at a third speed and irradiating the alignment material layer with a third light from the light source, wherein an angle between a second incident direction of the third light and the substrate is equal to a second angle, and the second angle prevents interference of the second incident light and a second reflected light of the alignment material layer;
- wherein, when the first angle is an acute angle, the second angle is an obtuse angle, and when the first angle is an obtuse angle, the second angle is an acute angle.
A method for manufacturing an alignment film, comprising:
- forming an alignment material layer on a substrate;
- moving the substrate in a first direction at a first speed and irradiating the alignment material layer with a first light from a light source, wherein the first light is perpendicular to the substrate;
- moving the substrate in the first direction at a second speed and irradiating the alignment material layer with a second light from the light source, wherein a first angle between a first incident direction of the second light and the substrate prevents interference of the first incident light and a first reflected light of the alignment material layer.
An apparatus for manufacturing an alignment film, comprising:
- a motion-mechanism, for a placement of a substrate with an alignment material layer and the motion-mechanism is configured to move the substrate, wherein the alignment material layer is disposed on the substrate;
- an irradiation-mechanism, configured to emit light for irradiating the alignment material layer on the substrate to form the alignment film with an alignment function;
- wherein, the motion-mechanism moves the substrate successively in a first direction at a first speed and a second speed, when the motion-mechanism moves the substrate in the first direction at the first speed, the irradiation-mechanism irradiates the alignment material layer with a first light perpendicular to the substrate;
- when the motion-mechanism moves the substrate in the first direction at the second speed, the irradiation-mechanism irradiates the alignment material layer with a second light, a first angle between a first incident direction of the second light and the substrate prevents interference of the first incident light and a first reflected light of the alignment material layer.
Dependencies are inferred from the claim text.