Double-layer graphene optical modulators and methods of fabrication thereof
AssigneeThe Regents of the University of California
InventorsHamed Dalir, Yang Xia, Yuan Wang, Xiang Zhang
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Abstract
This disclosure provides systems, methods, and apparatus related to optical modulators. In one aspect, a device includes a substrate, a first electrically insulating material disposed over the substrate, a first graphene layer and a second graphene layer disposed in the first electrically insulating material and being separated by the first electrically insulating material, and a waveguide disposed on the first electrically insulating material. At least a portion of the second graphene layer overlays at least a portion of the first graphene layer. The waveguide overlays both the first graphene layer and the second graphene layer.
Claims20
A device comprising:
- a substrate;
- a first electrically insulating material disposed over the substrate;
- a first graphene layer and a second graphene layer disposed in the first electrically insulating material and being separated by the first electrically insulating material, at least a portion of the second graphene layer overlaying at least a portion of the first graphene layer;
- and
- a waveguide disposed on the first electrically insulating material, the waveguide overlaying both the first graphene layer and the second graphene layer.
A device comprising:
- a substrate;
- a first electrically insulating material disposed over the substrate;
- a first 2-D semiconductor layer and a second 2-D semiconductor layer disposed in the first electrically insulating material and being separated by the first electrically insulating material, at least a portion of the second 2-D semiconductor layer overlaying at least a portion of the first 2-D semiconductor layer;
- and
- a waveguide disposed on the first electrically insulating material, the waveguide overlaying both the first 2-D semiconductor layer and the second 2-D semiconductor layer.
A method comprising:
- (a) depositing a first electrically insulating material over a substrate;
- (b) depositing a first graphene layer on the first electrically insulating material;
- (c) depositing a first electrode on a portion of the first graphene layer;
- (d) depositing the first electrically insulating material on the first graphene layer;
- (e) after operation (d), depositing a second graphene layer on the first electrically insulating material;
- (f) depositing a second electrode on a portion of the second graphene layer;
- (g) depositing the first electrically insulating material on the second graphene layer;
- and
- (h) after operation (g), forming a waveguide on the first electrically insulating material.
Dependencies are inferred from the claim text.