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US 2019/0155063 A1Published application
Vanadium dioxide-based optical and radiofrequency switches
AssigneeWisconsin Alumni Research Foundation
InventorsZhenqiang Ma, Chang-Beom Eom, Jaeseong Lee, Daesu Lee, Sang June Cho, Dong Liu
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Abstract
Switches for electromagnetic radiation, including radiofrequency switches and optical switches, are provided. Also provided are methods of using the switches. The switches incorporate layers of high quality VO2 that are composed of a plurality of connected crystalline VO2 domains having the same crystal structure and orientation.
Claims5
A heterostructure comprising:
- a substrate;
- an epitaxial layer of VO2 on the substrate;
- and
- a non-epitaxial layer of single-crystalline silicon bonded to the epitaxial layer of VO2.
1 more element
A structure comprising:
- a layer of VO2, wherein the layer of VO2 comprises a plurality of connected crystalline VO2 domains having the same crystal structure and epitaxial orientation;
- and
- a layer of single-crystalline silicon on a surface of the layer of VO2.
Dependencies are inferred from the claim text.