Apparatus for Deflecting a Laser Radiation or for Deflecting Light

Abstract

An apparatus for deflecting laser radiation comprises: a first lens array comprising a plurality of first lenses arranged next to one another to permit the laser radiation to at least partially pass through the first lens array; a second lens array comprising a plurality of second lenses arranged next to one another to at least partially pass through the second lens array laser radiation that has passed through the first lens array; a rotatable or pivotable first mirror arranged between the first and second lens arrays to deflect in a direction of the second lens array the laser radiation that has passed through the first lens array; and an objective lens to focus laser radiation that has passed through the second lens array into a working plane.

Dependencies are inferred from the claim text.