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US 2019/0155015 A1Published application
Wavelength Tunable Interference Filter, Optical Device, Optical Module, And Electronic Apparatus
AssigneeSeiko Epson Corporation
InventorAkira SANO
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Abstract
A wavelength tunable interference filter includes a movable section having a mirror region that faces a first mirror in a first direction and an electrode so provided in a region outside the mirror region in a plan view viewed in the first direction as to surround the mirror region along the circumferential direction thereof, the electrode configured to displace the movable section in the first direction when voltage is applied to the electrode, and the width of the electrode in the plan view varies in the circumferential direction.
Claims20
A wavelength tunable interference filter comprising:
- a first mirror;
- a movable section on which a second mirror that faces the first mirror is provided;
- and
- an electrode so provided in a region outside the second mirror as to surround the second mirror along a circumferential direction thereof in a plan view viewed in a first direction that is a direction perpendicular to a surface of the movable section that is a surface on which the second mirror is provided, the electrode being configured to displace the movable section in the first direction when voltage is applied to the electrode,
- wherein a width of the electrode in the plan view varies in the circumferential direction.
2 more elements
Dependencies are inferred from the claim text.