Physical quantity sensor, electronic device, and mobile body
AssigneeSeiko Epson Corporation
InventorSatoru TANAKA
Life of this patent
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Abstract
A physical quantity sensor has a first movable section, a second movable section that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, a movable section that is supported so as to be able to rock about an axis which is positioned between the first movable section and the second movable section, a first detection electrode which is arranged so as to oppose the first movable section, a second detection electrode which is arranged so as to oppose the second movable section, and a frame-form section which is arranged so as to surround at least a portion of the periphery of the movable section in planar view of the movable section and which has the same potential as the movable section.
Claims9
A physical quantity sensor comprising:
- a movable electrode which includes an H-shaped support section and a movable section connected to the H-shaped support section by a pair of linking sections that extend outward from the H-shaped support section, the movable section having a first movable section which is included at one side of the H-shaped support section and a second movable section which is included at the other side of the H-shaped support section and that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, and that is supported so as to be able to rock about an axis defined by the pair of linking sections that are positioned between the first movable section and the second movable section;
- a first electrode which is arranged so as to oppose the first movable section;
- a second electrode which is arranged so as to oppose the second movable section;
- a third electrode which is arranged so as to oppose the movable section, and not to overlap with the first electrode and the second electrode in a plan view of the movable section, and has the same electric potential as the movable electrode;
- and
- a peripherally arranged section which is arranged so as to surround at least a portion of a periphery of the movable section in the plan view of the movable section, and which has the same electric potential as the movable electrode,
- wherein the third electrode includes a first portion between the first electrode and the second electrode,
- wherein the first portion overlaps both of the first movable section and the second movable section in the plan view of the movable section, and
- wherein the first portion overlaps the axis in the plan view.
Dependencies are inferred from the claim text.