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US 2019/0154727 A1Published application
Physical Quantity Sensor, Electronic Device, And Mobile Body
AssigneeSeiko Epson Corporation
InventorsShota KIGURE, Satoru TANAKA
Life of this patent
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Abstract
A physical quantity sensor has a first movable electrode section which has a portion facing a first fixed electrode section and a second movable electrode section which has a portion facing a second fixed electrode section, and is provided with a movable mass section which is formed in a shape which encloses a first fixed electrode side fixed section, a second fixed electrode side fixed section, a first movable electrode side fixed section, and a second movable electrode side fixed section in planar view.
Claims12
A physical quantity sensor comprising:
- an X axis, a Y axis, and a Z axis that are orthogonal to each other;
- a first fixed electrode side fixed section having a first fixed electrode section;
- a second fixed electrode side fixed section that is disposed to directly face the first fixed electrode side fixed section in a direction along the X axis, the second fixed electrode side fixed section having a second fixed electrode section, the first and second fixed electrode sections being disposed side by side along the X axis;
- a first movable electrode side fixed section and a second movable electrode side fixed section that are disposed in a direction along the Y axis;
- a movable mass section that has a first movable electrode section having a portion facing the first fixed electrode section and a second movable electrode section having a portion facing the second fixed electrode section;
- a first elastic section that connects the first movable electrode side fixed section and the movable mass section along the Y axis;
- and
- a second elastic section that connects the second movable electrode side fixed section and the movable mass section along the Y axis,
- wherein the first and second fixed electrode side fixed sections are located between the first movable electrode side fixed section and the second movable electrode side fixed section when viewed in a direction along the Z axis.
6 more elements
Dependencies are inferred from the claim text.