Semiconductor Biosensor And Control Method Thereof

A semiconductor biosensor comprising:

• a central reaction unit of an inspection equipment, with the central reaction unit configured to be embedded into a semiconductor chip and exposed into a solution dissociating a plurality of targets, wherein the plurality of targets moves in the solution;
• and with the central reaction unit comprising:
• a plurality of first conducting wires;
• a plurality of second conducting wires;
• a common electrode source, wherein an end of each of the plurality of first conducting wires is connected to the common electrode source, and wherein another end of each of the plurality of first conducting wires is connected to an end of a respective one of the plurality of second conducting wires;
• a plurality of sense-amplifiers, wherein each of the plurality of sense-amplifiers is electrically connected to another end of the respective one of the plurality of second conducting wires;
• a plurality of non-volatile memory type transistors respectively formed on the plurality of second conducting wires, wherein each of the plurality of non-volatile memory type transistors comprises a control gate connecting to a corresponding one of the plurality of sense-amplifiers, a third oxide film, a floating gate, and a second oxide formed below the floating gate and on a corresponding one of the plurality of second conducting wires;
• a first oxide film wrapping or covering the plurality of first conducting wires, wherein a plurality of receptors is fixed on a surface of the first oxide film, wherein a portion of the plurality of targets couples with a portion of the plurality of receptors to form a plurality of composite bodies;
• wherein the plurality of sense-amplifiers is configured to detect a change in a current signal based on charges of the plurality of composite bodies,
• wherein an improving factor of a limit of detection (LOD) of the plurality of sense-amplifiers is defined as:
• ɛ
• ≅
• 1
• -
• m
• M
• ,
• wherein M is a total number of the plurality of sense-amplifiers, and wherein m is a number of the plurality of sense-amplifiers which detects one of the plurality of composite bodies,
• wherein an improved limit of detection (LOD) of the plurality of sense-amplifiers is defined as:
• Improved LOD=(1−ε)×LOD=m/M×LOD.