Gas sensor, gas detection apparatus, fuel cell powered vehicle, and manufacturing method of gas sensor
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsKoji KATAYAMA, Zhiqiang WEI, Shunsaku MURAOKA, Kazunari HOMMA
Life of this patent
Estimating the term…
Abstract
A gas sensor includes: a first electrode; a metal oxide layer that is on the first electrode and has a resistance value that changes when the metal oxide layer contacts hydrogen atoms; a second electrode on the metal oxide layer; and an insulating film that covers at least a part of side surfaces of the first electrode, the metal oxide layer, and the second electrode. In the metal oxide layer, a part of a first interface between the first electrode and the metal oxide layer is not covered by the insulating film and is exposed to a gas.
Claims19
A gas sensor that detects molecules of a gas, the gas sensor comprising:
- a first electrode;
- a metal oxide layer on the first electrode, the metal oxide layer having a resistance value that changes when the metal oxide layer contacts hydrogen atoms;
- a second electrode on the metal oxide layer;
- and
- an insulating film that covers at least a part of side surfaces of the first electrode, the metal oxide layer, and the second electrode,
- wherein, in the metal oxide layer, a part of at least one of a first interface between the first electrode and the metal oxide layer, and a second interface between the second electrode and the metal oxide layer is not covered by the insulating film and is exposed to the gas.
A manufacturing method of a gas sensor that detects molecules of a gas, the manufacturing method comprising:
- forming a first electrode;
- forming, on the first electrode, a metal oxide layer having a resistance value that changes when the metal oxide layer contacts hydrogen atoms;
- forming a second electrode on the metal oxide layer;
- forming an insulating film that covers at least a part of side surfaces of the first electrode, the metal oxide layer, and the second electrode;
- and
- forming, in at least a part of the insulating film and the second electrode, an opening that is recessed in a laminating direction of the insulating film, the second electrode, the metal oxide layer, and the first electrode, to expose at least a part of a first interface between the second electrode and the metal oxide layer.
Dependencies are inferred from the claim text.