High temperature gas sensor
AssigneeHoneywell International Inc.
InventorsAlistair David Bradley, Ronald W. Myers, Karen Marie Newstrom-Peitso
Life of this patent
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Abstract
A gas sensor for sensing a gas of interest includes a ceramic carrier and a porous ceramic lid that is secured to the ceramic carrier. The porous ceramic lid and the ceramic carrier together define a sensor cavity. A gas sensor is situated in the sensor cavity and is spaced from the porous ceramic lid. The porous ceramic lid is configured to allow the gas of interest to move through at least part of the porous ceramic lid and into the sensor cavity to be sensed by the gas sensor. In some cases, the gas sensor is a MEMS gas sensor.
Claims20
A gas sensor for sensing a gas of interest, the gas sensor comprising:
- a ceramic carrier;
- a porous ceramic lid secured to the ceramic carrier, wherein the porous ceramic lid and the ceramic carrier define a sensor cavity;
- a gas sensor situated in the sensor cavity, wherein the gas sensor is spaced from the porous ceramic lid;
- and
- wherein the porous ceramic lid is configured to allow the gas of interest to move through at least part of the porous ceramic lid and into the sensor cavity to be sensed by the gas sensor.
A gas sensor for sensing a gas of interest, the gas sensor comprising:
- a sensor die defining a diaphragm, the sensor die including a gas sensing active region supported by a first side of the diaphragm and a heater for heating the gas sensing active region;
- a ceramic housing that defines a sensor cavity for housing the sensor die, the ceramic housing configured to:
- expose the gas sensing active region to the gas of interest, and
- vent a second side of the diaphragm, opposite to the first side, to reduce a pressure differential across the diaphragm.
A gas sensor for sensing a gas of interest, the gas sensor comprising:
- a sensor die defining a diaphragm, the sensor die including a gas sensing active region supported by the diaphragm and a heater for heating the gas sensing active region;
- and
- a ceramic housing that defines a sensor cavity for housing the sensor die, the ceramic housing comprises a plurality of ceramic layers, where at least some of the plurality of ceramic layers include an aperture that defines at least part of the sensor cavity.
Dependencies are inferred from the claim text.