Electron beam apparatus comprising monochromator
AssigneeKorea Research Institute of Standards and Science
InventorsTakashi OGAWA, Ju Hwang KIM
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Abstract
The present invention relates to an electron beam apparatus including a monochromator in which cylindrical electrostatic lenses for deflecting a path of an electron beam in the lenses are arranged symmetrically and an aperture including a plurality of selectable slits is disposed therebetween to be able to select an electron beam having a specified energy range. The electron beam apparatus has a monochromator having high resolution and excellent stability and maintainability by disposing slits and circular openings in one aperture part in parallel arrangement, thereby improving spatial resolution and energy resolution.
Claims22
An electron beam apparatus including a monochromator, comprising:
- an electron source, the monochromator limiting energy of an electron beam emitted from the electron source to a predetermined range, a lens system, and a detector,
- wherein the monochromator includes:
- an aperture part that includes a plurality of rectangular energy selection slits, a plurality of dummy slits, and a plurality of circular slits;
- and
- a position adjustment part for adjusting a position of an aperture to change the slits.
Dependencies are inferred from the claim text.