An elastomeric seal
AssigneePrecision Polymer Engineering Ltd.
InventorsMurat GULCUR, Christopher Julian THORNTON, Paul Andrew HAWORTH, John Edward KERWIN
Life of this patent
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Abstract
An elastomeric seal for use in semiconductor manufacturing apparatus comprising an ink on at least a portion of the upper surface thereof, wherein the ink comprises a barrier material, the barrier material being operable to prevent or reduce degradation of the elastomeric seal from ultraviolet (UV) radiation.
Claims15
An elastomeric seal for use in semiconductor manufacturing apparatus comprising an ink on at least a portion of the upper surface thereof, wherein the ink comprises a barrier material, the barrier material being operable to prevent or reduce degradation of the elastomeric seal from ultraviolet (UV) radiation.
A method of forming an elastomeric seal for use in semiconductor manufacturing apparatus comprising depositing an ink on at least a portion of an upper surface thereof, wherein the ink comprises a barrier material, the barrier material being operable to prevent or reduce degradation of the seal from ultraviolet (UV) radiation.
A method of preventing or reducing degradation of an elastomeric seal by ultraviolet (UV) radiation, the method comprising depositing an ink on at least a portion of an upper surface of the said elastomeric seal, wherein the ink comprises a barrier material, the barrier material being operable to prevent or reduce degradation of the elastomeric seal from ultraviolet (UV) radiation.
Dependencies are inferred from the claim text.