Large, uv-transparent aluminum nitride single crystals
AssigneeCrystal IS, Inc.
InventorsRobert T. BONDOKOV, Jianfeng CHEN, Keisuke YAMAOKA, Shichao WANG, Shailaja P. RAO, Takashi SUZUKI, Leo J. SCHOWALTER
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Abstract
In various embodiments, single-crystal aluminum nitride boules and substrates having high transparency to ultraviolet light and low defect density are formed. The single-crystal aluminum nitride may function as a platform for the fabrication of light-emitting devices such as light-emitting diodes and lasers.
Claims18
-15. (canceled)
A single-crystal AlN substrate having an ultraviolet (UV) transparency metric ranging from approximately 20 cm3 to approximately 5000 cm3 at a wavelength of interest of 265 nm, the UV transparency metric being defined in cm3 as:
- d
- 10
- ×
- FWMH
- ×
- α
- 2
- wherein d is a diameter of the AlN substrate in mm, FWHM is a full-width at half-maximum of an x-ray diffraction curve of the AlN substrate in radians, and a is an absorption coefficient of the AlN substrate at the wavelength of interest.
-45. (canceled)
Dependencies are inferred from the claim text.