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US 2019/0153603 A1Published application
Substrate temperature monitoring
AssigneeApplied Materials, Inc.
InventorSanjay D. YADAV
Life of this patent
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Abstract
Embodiments disclosed herein generally relate to a substrate temperature monitoring system in a substrate support assembly. In one embodiment, the substrate support assembly includes a lift pin. The lift pin has a body. The body has an interior passage and a rounded top surface configured for contacting a substrate when in use. A substrate temperature sensor disposed in the interior passage.
Claims14
A lift pin for a processing chamber, the lift pin comprising:
- a body comprising:
- an interior passage;
- and
- a rounded top surface configured for contacting a substrate when in use;
- and
- a substrate temperature sensor disposed in the interior passage.
3 more elements
A processing chamber, comprising:
- a chamber body comprising a top wall, a sidewall, and a bottom wall defining a processing region in the chamber body;
- and
- a substrate support assembly disposed in the processing region, the substrate support assembly comprising:
- a support plate having a top surface configured to support a substrate;
- and
- a substrate temperature monitoring system is disposed in the support plate and is configured to measure a temperature of the substrate from a bottom surface of the substrate.
3 more elements
Dependencies are inferred from the claim text.