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AssigneeFujimi Incorporated
InventorsHitoshi MORINAGA, Kazusei TAMAI, Maiko ASAI, Yuuichi ITO, Kyosuke TENKO, Toru KAMADA
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Provided are an abrasive, a polishing composition, and a polishing method capable of polishing the surface of an alloy or metal oxide at a sufficient polishing removal rate and providing a high-quality mirror surface. The abrasive contains alumina having an α-conversion rate of 80% or more and having a 50% particle diameter, in a volume-based cumulative particle diameter distribution, of 0.15 μm or more to 0.35 μm or less. The polishing composition contains this abrasive and has a pH of 7 or less. These abrasive and polishing composition are used for polishing polishing objects containing at least one of an alloy and a metal oxide.
An abrasive used for polishing of a polishing object containing at least one of an alloy and a metal oxide, comprising alumina having an α-conversion rate of 80% or more and having a 50% particle diameter, in a volume-based cumulative particle diameter distribution, of 0.15 μm or more to 0.35 μm or less.
Dependencies are inferred from the claim text.