Method and system for lot-tool assignment
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsRen-Chyi YOU, An-Wei PENG, Chang-Zong LIU, Jun-Sheng YEH
Life of this patent
Estimating the term…
Abstract
A method is disclosed and includes generating a tool-lot relationship based on at least one process constraint and a dispatching rule which includes dispatching preferences for operating at least one lot; assigning the at least one lot to at least one tool by using the tool-lot relationship; and the at least one tool, assigned using the tool-lot relationship, processing the at least one lot by utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.
Claims20
A system, comprising:
- at least one processor;
- and
- at least one memory including computer program codes for one or more programs, when executed by the at least one processor, cause the system to:
- generate a tool-lot relationship based on at least one process constraint in a process constraint database, and based on a dispatching rule which includes dispatching preferences for operating at least one lot;
- and
- process the at least one lot by at least one tool with utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.
A method comprising:
- generating a tool-lot relationship based on at least one process constraint and a dispatching rule which includes dispatching preferences for operating at least one lot;
- assigning the at least one lot to at least one tool by using the tool-lot relationship;
- and
- the at least one tool, assigned using the tool-lot relationship, processing the at least one lot by utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.
A non-transitory computer readable medium comprising computer executable instructions for carrying out a method, the method comprising:
- assigning at least one lot to at least one tool by using a tool-lot relationship that is generated based on at least one process constraint and a dispatching rule which includes dispatching preferences for operating at least one lot;
- and
- processing the at least one lot by the at least one tool with utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.
Dependencies are inferred from the claim text.