US 2019/0127979 A1 · HIGH-DAMPING RC LATTICE BEAM AND HIGH-DAMPING RC LATTICE BEAM STRUCTURE USING SAME

Abstract

An RC lattice beam is provided that can greatly dampen the transfer of vibrations in particular. As the concrete included in the RC lattice beam is polymer concrete that contains a polymer, fine-scale vibrations that may otherwise affect exposure apparatuses may be effectively dampened, while the depth of the conventional lattice beam may be kept the same. Thus, a high-damping RC lattice beam is provided that is capable of maximizing the performance of a precision exposure apparatus by reducing the defect rate and improving productivity.

Claims11

Dependent claims

A high-damping RC lattice beam forming a slab in a floor of a semiconductor factory, wherein concrete included in the lattice beam is designed to have a damping ratio greater than 15%.

A substructure having high-damping RC lattice beams, the substructure comprising:

studs installed inside a semiconductor factory, the studs being vertical columns installed in predetermined intervals along longitudinal and lateral directions;
a unidirectional beam placed and affixed to upper portions of two adjacent studs so as to traverse and connect the upper portions of the two adjacent studs;
and
a lattice beam of a rectangular shape, lattice beam installed to fill in a rectangular horizontal area surrounded by unidirectional beams,
wherein the lattice beam includes polymer concrete having a polymer added therein.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

15/993,147Filed 30 May 2018

Priority

KR 10-2017-014260430 Oct 2017

Published

2 May 2019

Term ends

Not estimatedThe source records don’t support an estimate.

Classification17 codes

E04C 3/20
Joists; Girders, trusses, or trusslike structures, e.g. prefabricated; Lintels; Transoms; Braces: of concrete or other stone-like material, e.g.…
C04B 26/02
Compositions of mortars, concrete or artificial stone, containing only organic binders , e.g. polymer or resin concrete: macromolecular compounds
C04B 28/02
Compositions of mortars, concrete or artificial stone, containing inorganic binders or the reaction product of an inorganic and an organic…
C04B 40/0039
Aspects relating to the mixing step of the mortar preparation: premixtures of ingredients

High-damping rc lattice beam and high-damping rc lattice beam structure using same

Life of this patent

High-damping rc lattice beam and high-damping rc lattice beam structure using same

Life of this patent

Abstract

Claims11