Transfer apparatus and transfer method
AssigneeToshiba Kikai Kabushiki Kaisha
InventorsMitsunori KOKUBO, Takato BABA, Toshiaki GOTO
Life of this patent
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Abstract
According to one embodiment, a transfer apparatus includes a rolled web mold installation part for installing a rolled web mold around which the mold is wound, a transfer roller for winding the mold fed out from the rolled web mold, a winding roll for winding up the mold, a winding roll installation part for installing the winding roll therein, and a mold installation assisting part for guiding the mold fed out from the rolled web mold up to the winding roll while suppressing an occurrence of wrinkles in the mold fed out from the rolled web mold.
Claims6
A transfer apparatus for transferring a fine transfer pattern formed on a mold to a resin coated on a substrate, comprising:
- a rolled web mold installation part configured to install a rolled web mold around which the mold is wound;
- a transfer roller configured to wind the mold fed out from the rolled web mold installed in the rolled web mold installation part, around the transfer roller;
- a winding roll configured to be capable of winding up the mold fed out from the rolled web mold installed in the rolled web mold installation part and also wound around the transfer roller;
- a winding roll installation part configured to install the winding roll therein;
- and
- a mold installation assisting part configured to perform to:
- wind the mold, which has been fed out from the rolled web mold installed in the rolled web mold installation part, around the transfer roller while suppressing an occurrence of wrinkles in a fed-out portion of the mold;
- and
- guide the mold up to the vicinity of the winding roll installed in the winding roll installation part.
A transfer method for transferring a fine transfer pattern formed on a mold to a resin coated on a substrate, the transfer method comprising:
- installing a rolled web mold around which the mold is wound, in a rolled web mold installation part;
- winding the mold fed out from the rolled web mold installed in the rolled web mold installation part, around a transfer roller;
- installing an end of the mold, which has been fed out from the rolled web mold installed in the rolled web mold installation part and further wound around the transfer roller, in a winding roll installed in a winding roll installation part;
- winding the mold, which has been fed out from the rolled web mold installed in the rolled web mold installation part, around the transfer roller while suppressing an occurrence of wrinkles in a fed-out portion of the mold, after installing the rolled web mold in the rolled web mold installation part and when executing winding the mold around the transfer roller and installing the end of the mold in the winding roll;
- and
- guiding the mold up to the vicinity of the winding roll installed in the winding roll installation part with use of the mold installation assisting part.
Dependencies are inferred from the claim text.