Parallel reactor systems and methods for preparing materials

A method for processing corrosive materials in a parallel reactor system, the parallel reactor system comprising:

• a reactor array comprising at least two reaction vessels;
• a dispensing system having a dispensing needle that dispenses a first corrosive fluid into each reaction vessel;
• an antechamber disposed above each reaction vessel and comprising a venting outlet that purges vapor produced by the first corrosive fluid from the antechamber;
• an antechamber sealing member associated with each reaction vessel;
• and
• an actuatable valve between the antechamber and each reaction vessel,
• the method comprising:
• lowering the dispensing needle into the antechamber to form a seal between the antechamber sealing member and the dispensing needle;
• lowering the dispensing needle into each reaction vessel and dispensing the first corrosive fluid into each reaction vessel;
• raising the dispensing needle to position a tip of the dispensing needle in the antechamber;
• isolating the antechamber from each reaction vessel by closing the actuable valve, wherein closing the actuatable valve is controlled by an actuating mechanism;
• purging vapor produced by the first corrosive fluid from the antechamber after the actuatable valve is closed;
• and
• withdrawing the dispensing needle from the antechamber.