Micro-electro-mechanical system (mems) and related actuator bumps, methods of manufacture and design structures

A method of manufacturing a MEMS structure, comprising:

• forming fixed actuator electrodes and a contact point;
• forming a MEMS beam over the fixed actuator electrodes and the contact point;
• and
• forming an array of actuator bumps in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from contacting an actuator portion of the fixed actuator electrodes, wherein the array of actuator bumps are composed of a dielectric material.

A method of manufacturing a MEMS structure, comprising:

• forming fixed actuator electrodes and a contact point;
• forming a MEMS beam over the fixed actuator electrodes and the contact point;
• and
• forming an array of actuator bumps in alignment with portions of the fixed actuator electrodes, wherein the array of actuator bumps are composed of a dielectric material.