Micromechanical sensor and method for manufacturing a micromechanical sensor

A micromechanical sensor, comprising:

• a substrate;
• a movable mass element sensitive in three spatial directions;
• two x-lateral electrodes for detecting a lateral x-deflection of the movable mass element;
• two y-lateral electrodes for detecting a lateral y-deflection of the movable mass element;
• and
• z-electrodes for detecting a z-deflection of the movable mass element, wherein:
• each electrode is fastened on the substrate via fastening elements, and
• the fastening elements of all the electrodes are formed close to a connection element of the movable mass element to the substrate.

A method for manufacturing a micromechanical sensor, comprising:

• providing a substrate;
• providing a movable mass element that is sensitive and movable in three spatial directions;
• forming two x-lateral electrodes;
• forming two y-lateral electrodes;
• forming two z-electrodes;
• and
• fastening all the electrodes to the substrate close to a connection element of the movable mass element.