Oven controlled mems oscillator and system and method for calibrating the same

An oven controlled MEMS oscillator device comprising:

• a silicon platform;
• a resonator coupled to the silicon platform;
• a temperature sensor coupled to the silicon platform and configured to output a temperature measurement signal during operation of the oven controlled MEMS oscillator device;
• a heater coupled to the platform and configured to heat the oven controlled MEMS oscillator device based on a heat control signal;
• non-volatile electronic memory configured to store a target set-point;
• and
• a heat control circuit configured to generate the heat control signal based on a difference between the stored target set-point value and the temperature measurement signal output from the temperature sensor,
• wherein the heat control circuit is configured minimize the heat control signal by adjusting the heater to minimize the difference between the stored target set-point value and the temperature measurement signal.

A method for calibrating an oven controlled MEMS oscillator, the method comprising:

• separately selecting each of a plurality of predetermined target set-point values;
• controlling a heater in the oven controlled MEMS oscillator to adjust a set-point of the oven controlled MEMS oscillator based on each of the selected predetermined target set-point values;
• measuring, by an oscillation measurement circuit, respective oscillation frequencies of the oven controlled MEMS oscillator at each adjusted set-point corresponding to each of the selected predetermined target set-point values;
• determining a target set-point operation value based on the measured oscillation frequencies;
• and
• calibrating the oven controlled MEMS oscillator based on the determined target set-point operation value.